| Applicable parts size | 650mm x 650mm x 1600mm |
| Rotation angle | Rotate the X-axis 180 °; Y-axis rotation 360 ° |
| Motion mode | X asis drive Y asis |
| Working gas | ≥5bar Ar/ N2 |
| Oxygen content | ≤30000ppm |
| Power supply | 380VAC, 50Hz, |
| Dimension | 2.5mx2.4mx4.3m |
| Weight | 4200kg |
| Max. rolling-over weight | Including Substrate |
| Installation | 5.5mx5.5mx4.6m |