Applicable parts size | 650mm x 650mm x 1600mm |
Rotation angle | Rotate the X-axis 180 °; Y-axis rotation 360 ° |
Motion mode | X asis drive Y asis |
Working gas | ≥5bar Ar/ N2 |
Oxygen content | ≤30000ppm |
Power supply | 380VAC, 50Hz, |
Dimension | 2.5mx2.4mx4.3m |
Weight | 4200kg |
Max. rolling-over weight | Including Substrate |
Installation | 5.5mx5.5mx4.6m |